Ultra-Flat Silicon Wafers

These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.

REF: D71893 Categories: Science Materials, Silicon wafers for AFM, STM

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Description

Specifications

	4″	6″	8″
Material:	Silicon	Silicon	Silicon
Diameter:	100 mm	150 mm	200 mm
Orientation:	<100>	<100>	<100>
Type/Dopant:	P/Boron	P/Boron	P/Boron
Grade:	Prime/CZ Virgin	Prime/CZ Virgin	Prime/CZ Virgin
Growth Method:	CZ	CZ	CZ
Resistivity:	10-20 Ohm-cm	10-20 Ohm-cm	10-20 Ohm-cm
Thickness:	525µm ±20µm	675µm ±20µm	725µm ±20µm
TTV:	<4.00µm	<4.00µm	<4.00µm
SFPD:	<2.0µm	<2.0µm	<2.0µm
Warp:	≤30µm	≤30µm	≤30µm
Bow:	≤30µm	≤30µm	≤30µm
Particles:	≤20@≥0.3µm	≤20@≥0.3µm	≤20@≥0.3µm
Front Surface:	Polished	Polished	Polished
Back Surface:	Etched	Etched	Etched
Flat:	2 per SEMI Standard	1 per SEMI Standard	2 per SEMI Standard
Site Flatness:	<2.0µm	<2.0µm	<2.0µm
Roughness:	Typically 2-3Å	Typically 2-3Å	Typically 2-3Å

Additional information

Unit	each, each

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